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</tr> <tr> <td> <a href="/EditorArticle/40/" target="_blank">他的文章</a> </td> </tr> </tbody> </table> </div> <div class="floatedit01"> <img src="/images/fediter03.gif"> </div> </div> <div class="sub4lft"> <div class="sub4textit"> 国产光刻机破�?首台产品将于年内交付 </div> <div class="tabtit0523"> <ul> <li class="zhengwen"><a href="/Information/Industry/News/3355/335527.htm">正文</a></li> <li class="this" id="commentBar"><a href="/Comment_335527.html" style="text-decoration: none">我来说两�?span>(已有<span class="fcred commentNum">0</span>人参�?/span><span>)</span></a></li> </ul> </div> <div class="sub4textexpl"> <ul> <li>2021/9/26 11:49:40</li> <li>类型：原�?/li> <li>来源�?span>电脑�?/span></li> <li>报纸编辑�?a id="editor" href="/EditorArticle/40/" style="text-decoration: underline; color: blue;">电脑�?/a></li> <li>作者：</li> </ul> </div> <div class="sub4summary"> 【电脑报在线】半导体产业的核心在于制造，制造的核心在于设备�? </div> <div class="sub4text"> <p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">芯片制造之母，无比重要的光刻机</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在芯片制造漫长的产业链中，光刻机是最为耀眼的明珠，它代表了科技发展的顶级水平（另一个是航空发动机），更是芯片制造中必不可少的精密设备。在半导体领域，光刻机作为前道工艺七大设备之首（光刻机、刻蚀机、镀膜设备、量测设备、清洗机、离子注入机、其他设备），价值含量极大，技术要求极高�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">我们使用的几乎所有的电子设备都会使用芯片，而芯片制造的过程有：硅片的制备－-〉外延工艺－-〉热氧化�?〉扩散掺杂－-〉离子注入－-〉薄膜制备－-〉光刻－-〉刻蚀�?〉工艺集成等�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在同样大小的芯片制造过程中中，想让晶体管的数量增多，就需要从芯片的精细结构下手，如果芯片的制造能够越来越精细，达到相邻两个期间之间的距离达到几纳米的情况，芯片所能容纳的集体管会更多。那么对于精细结构的制造，该怎么才能做到呢？目前主流的是采用放大的思想，通过制造一个放大的模板（即掩膜），光通过模板照到硅片上，这也是光刻机的核心技术�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.64376130198915" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzWuankfVr6kPK3YkzHPnMbugydjGmyxTicPeGIgjiatlQm9Y2ibsGafQ/640?wx_fmt=png" data-type="png" data-w="553" _width="553.26px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzWuankfVr6kPK3YkzHPnMbugydjGmyxTicPeGIgjiatlQm9Y2ibsGafQ/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.26px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(136, 136, 136); font-size: 12px; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; overflow-wrap: break-word !important;">�?/span>图片来源：英特尔官方网站</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在集成电路制造工艺中，光刻是决定集成电路集成度的核心工序。光刻的原理是在硅片表面覆盖一层具有高度光敏感性的光刻胶，再用光线（一般是紫外线、深紫外线、极紫外线）透过掩模照射在硅片表面，被光线照射到的光刻胶会发生化学反应。此后用特定显影液洗去被照射/未被照射的光刻胶，就实现了电路图从掩模到硅片的转移。一般的光刻工艺要经历旋转涂胶、软烘、对准与曝光、曝光后烘焙、显影、坚膜烘焙、显影检查等工序�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.5523465703971119" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaWvhMFFYI8hrUCtsSV7fHUdVhZXfwtdByz1E72zjqkDib7BMw0K1micDw/640?wx_fmt=png" data-type="png" data-w="554" _width="553.66px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaWvhMFFYI8hrUCtsSV7fHUdVhZXfwtdByz1E72zjqkDib7BMw0K1micDw/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.66px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">�?/span><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">图片来源：北京华卓精科IPO说明�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">光刻机是完成光刻工艺的半导体设备。光刻机主要包括光源、投影物镜和工件台三个子系统及其他部件。其中，光源系统的主要作用为发出符合光刻要求的激光，投影物镜系统的主要作用为对光源发出光线进行精准聚焦，双工件台的主要作用为承载硅片并根据光刻需求进行精密运动，其决定了光刻机的分辨率和生产效率�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">经过多年的发展，光刻机按光源类型可分为五类：I-line 光刻机、KrF 光刻机、ArF 光刻机、ArFi 光刻机（�?ArF 浸没式光刻机，与 ArF 光刻机相比在曝光过程中在投影物镜和晶圆之间形成了一层水膜）、EUV 光刻机；按照应用领域可分�?IC 前道光刻机和 IC 后道光刻机。其中，IC 前道光刻机主要应用于芯片制造，而后道光刻机主要用于芯片封装�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2020年光刻机市场规模�?51亿美元，在整个半导体设备中占比约21%；涂胶显影设备市场规模约19亿美元，在整个半导体设备中占比约3%；干法去胶设备市场规模约6亿美元，在整个半导体设备中占比约1%�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">从市值来看，光刻机在整个半导体领域所占比重并不高，但作为最上游的“母机”，光刻机对整个半导体生态的影响是巨大的�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">光刻机之痛，中外差距巨大</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在实际半导体生产过程中，一个芯片的产生要经历几十次光刻才能完成，有些结构层甚至需要多次光刻才能形成。光刻是芯片制造的核心，是IC制造的最关键步骤，它确定了芯片的关键尺寸。在主流的微电子制造过程中，光刻是最复杂、昂贵和关键的工艺，其成本约占整个硅片加工成本的三分之一甚至更多。同时光刻机也是不可替代的，光刻成本占到了芯片整体制造工艺的40%�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而，在半导体设备中最为重要的一环——光刻机设备，最先进的技术基本被阿斯麦、佳能及尼康三大国际大厂垄断，其中阿斯麦（ASML）几乎在EUV（极紫外光刻）领域是垄断的，它垄断了全球14nm以上的高端光刻机市场，特别是7nm以上光刻机更�?00%垄处于垄断地位�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.628158844765343" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaKKKkgUwpcWvMKhyCrfWtiasW94iafWML3TqZibgRpZBYsORibOm7HdsfNg/640?wx_fmt=png" data-type="png" data-w="554" _width="553.61px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaKKKkgUwpcWvMKhyCrfWtiasW94iafWML3TqZibgRpZBYsORibOm7HdsfNg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.61px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">随着光源、曝光方式不断改进，光刻机前后共经历�?代产品，每一代产品都在不断降低光源波长，同时缩小制程线宽。第四代浸入式光刻机，最高制程可�?nm，在7nm之后必须使用第五代EUV光刻机，其采用EUV光源，波长为13.5nm，制程节点为7-3nm，是目前最先进的光刻机。而国内能与国际大厂正面抗衡的企业，暂时还没有�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">不少国人第一次高度关注和重视光刻机可以追溯到2018年，当年5月，中芯国际向ASML下单一台价�?.2亿美元的EUV光刻机，预计2019年底交付�?020年进行安装�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">几乎同时，特朗普政府向荷兰政府发出威胁，不得向中国交付这台EUV光刻机，否则美国政府将断供该光刻机上的美国部件，并在2019年明确向荷方表态：“好的盟友不会向中国出售这类设备”�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2019�?1月，ASML宣布，荷兰政府不再续签相关出口许可，向中芯国际出售EUV光刻机的计划正式终止�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.5782747603833865" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iahPcfrz7bv8TGspSRwXXclIniczSnq2MdfhpZoSAfpGzicz57wNX9p1KA/640?wx_fmt=png" data-type="png" data-w="626" _width="553.742px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iahPcfrz7bv8TGspSRwXXclIniczSnq2MdfhpZoSAfpGzicz57wNX9p1KA/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.742px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">这意味着，中国大陆的芯片厂商无法突破芯片10nm制程。而早�?017年，国产旗舰手机的芯片制程就已经来到10nm。到2021年，各品牌的旗舰手机芯片制程已经普遍使用5nm技术。也就是说，中国大陆无法自产电子产品所需要的先进制程芯片。这对中国大陆的半导体芯片制造产业，无疑是一个巨大的压制和打击�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">一�?2亿人民币，备受追捧的EUV光刻�?/span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">拥有先进的光刻机，意味着拥有制造先进制程芯片的潜力，而EUV光刻机成为这一切的关键所在�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">随着半导体技术的更新换代，光刻机也从最开始的g线（436nm）逐渐发展为近十年间兴起的EUV光刻机，从接触式向接近式，最后演变成步进式为主。EUV光刻机，又称极紫外线光刻机，是芯片生产工具，是生产大规模集成电路的核心设备，对芯片工艺有着决定性的影响，其中，小于5纳米的芯片晶圆，只能用EUV光刻机生产�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.45027124773960214" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzCfnvAN8rzf2ymzsMYWvpOz0MdQD7ENKSibF5o04eafTw2aib0zx2BQ/640?wx_fmt=png" data-type="png" data-w="553" _width="553.48px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzCfnvAN8rzf2ymzsMYWvpOz0MdQD7ENKSibF5o04eafTw2aib0zx2BQ/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.48px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">作为全球唯一一家能EUV光刻机的厂家，ASML自然获得了大量的订单，截止至2019年第二季度，ASML的NEX:3400B EUV光刻机的装机数量已经多达38台，而下半年他们推出了效率更高的NEX:3400C光刻机�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">�?019�?全年一共交付了26套EUV光刻机，为他们带来了27.89亿欧元的收入，占了全年收入的31%，而全年卖�?2台的ArFi远紫外线光刻机才进账47.67亿欧元，可见一套EUV光刻机是多么地赚钱�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.6799276672694394" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iak2qmNNbtTvNjLibDdicH4mQwouicwJzYAsRTdur1zKYa5ZVeoTx46GvUw/640?wx_fmt=png" data-type="png" data-w="553" _width="553.21px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iak2qmNNbtTvNjLibDdicH4mQwouicwJzYAsRTdur1zKYa5ZVeoTx46GvUw/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.21px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">10�?4日，ASML总裁兼首席执行官Peter Wennink在介绍公司三季度业绩时，说：“我们第三季度的新增订单达到�?9亿欧元，其中5.95亿欧元来�?台EUV设备。”由此估算，一台EUV光刻机的售价高达1.48亿欧元，折合人民�?1.74亿元�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">这个价格有多贵呢？按波音公司2014年产品目录公布的价格，一架波音B787飞机的零售价�?.571亿美元，按现在的汇率计算，大约合人民�?7.3亿元人民币�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">ASML财报数据显示�?020年，阿斯麦占据全球EUV光刻机出货的100%，占全球深紫外光刻机（DUV）出货的62%，剩下的份额由尼康和佳能瓜分。目前，阿斯麦最新一代极紫外光刻机TWINSCAN NXE:3600D已交付给客户，相较于前一代产品，该机型生产力提高15%-20%，套刻精度提�?0%</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而，在全球发生大规模“芯荒”之后，美国和欧洲各国政府已集中精力增强本国的芯片制造能力，这导致了政府对该行业的直接支持。美国参议院上个月通过一项法案，要求提供520亿美元的补贴来支持国内芯片生产�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">《华尔街日报》指出，EUV光刻机不能很快地装配在一起，随着全球芯片产能的扩张，阿斯麦的光刻机开始出现供不应求，客户有时甚至会要求在没有进行全面测试的情况下发货�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.46835443037974683" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaEib76Mcj5IZTZqlpS5FibQhOAcYOl9Hpjicmf42Upm63GkvXGgs8etFhg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.28px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaEib76Mcj5IZTZqlpS5FibQhOAcYOl9Hpjicmf42Upm63GkvXGgs8etFhg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.28px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">这种情况，也让阿斯麦有底气说出，即便暂时无法向中国大陆出货，其营收也不会受到影响，“我们的客户渴望得到这些机器”！</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">事实上，从EUV光刻机被生产出来那一刻开始，EUV光刻机就面临着缺货问题，一方面是ASML产能低，另外一方面是EUV光刻机需求巨大。据悉，三星和台积电是目前芯片制造技术最先进的厂商，两者一直都购买更多EUV光刻机，甚至三星李在镕都亲自去ASML协商购买更多EUV光刻机�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">另外，英特尔也在购买更多EUV光刻机，尤其是英特尔宣布进入晶圆代工领域，还�?025年重回芯片制造领域中的第一名后，其对EUV光刻机的需求更是直线增加�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">遗憾的是，根据ASML发布的数据显示，今年上半年仅交付�?0台EUV光刻机，还积压了大量的EUV光刻机订单，订单金额高达几十亿欧元。该数据显示，EUV光刻机被研发出来，ASML一直都在想办法提升产能，但这么多年过去了，ASML共计出货100余台EUV光刻机，今年年产能仅�?5台�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">显然，EUV光刻机供不应求的局面短时间内无法改变，国内光刻机市场状况又如何呢？</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">奋力追赶，一步一个脚�?/span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">国内半导体产业使用的光刻机和国际先进企业使用的光刻机究竟有多大区别呢�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2015年，英特尔、三星、台积电购入ASML出产�?0nm制程EUV光刻机，领先进入10nm时代。而反观中芯国际历尽艰辛，只能买到ASML�?010年生产的32nm光刻机，整整落后�?年�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.3471971066907776" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaA0y6GemhOOXF7QYpHZj3ickby0qxJLNpsg5SnrQSUGycQBT6Cv5bOag/640?wx_fmt=png" data-type="png" data-w="553" _width="552.54px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaA0y6GemhOOXF7QYpHZj3ickby0qxJLNpsg5SnrQSUGycQBT6Cv5bOag/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 552.54px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：台积电官�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">5年的时间对于半导体产业来说，已经足够更新换代三次！按照公开披露的数据，2014年华为的研发经费�?5亿美元，是台积电的三倍以上。按照中国半导体行业业内的共识，如果中国大陆能像台湾省、韩国一样购进最先进的EUV光刻机，中国大陆能够在短时间内追平世界顶尖的半导体制造水平�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在外购路途不畅的情况下，自研突破封锁成为国人关注的焦点�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">早在2002年，光刻机就正式列入�?63重大科技攻关计划”。这一年，科技部和上海市政府共同牵头，国内多家企业共同组建了上海微电子，重点研�?00nm步进扫描投影光刻机�?008年国家启动了主攻装备、材料和工艺等配套能力的�?2专项”，扶持国内光刻机产业链。除了上海微电子负责整机制造，还扶持了一批配套企业的研发：比如长春光电所、上海光电所和国科精密研究曝光光学系统，华卓精科承担双工件台，南大光电研制光刻胶，启尔机电负责突破DUV光刻机液浸系统等�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">如今，国产光刻机在艰难中已有了星星之火。十余年的持续投入下，国内产业链在光源系统、曝光光学系统等方面取得突破�?016年，国科精密研发的国内首套用于高�?IC 制造的 NA=0.75 投影光刻机物镜系统、国望光学研发的首套90nm节点ArF投影光刻机曝光光学系统都已交付�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.8028933092224232" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaYzCOCibicQsVRHEWwfKxqibS5sgGE5ic54nrczusJIpkaC4ibHZVrnicURdg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.33px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaYzCOCibicQsVRHEWwfKxqibS5sgGE5ic54nrczusJIpkaC4ibHZVrnicURdg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.33px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：上海微电子官�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在国产光刻机技术领域，上海微电子（SMEE）一枝独秀。其产品主要采用ArF、KrF和i-line光源，目前只能达�?0nm制程，且主要用于IC的后道封装和面板领域。SMEE作为国内最领先的光刻机研发企业，有非常多的光刻工艺人才，在产业链还未成熟的国内光刻机行业中，人才优势是主要核心竞争力。作为芯片行业的上游，目前国内还未出现能制造出能满足芯片行业需求的企业，而有着众多光刻工艺人才的SMEE，自然而然就成为最有竞争优势的企业�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2020�?月初，上海微电子宣布将在2021-2022年交付第一�?8nm工艺的国产浸入式光刻机，国产光刻机有望从此前�?0nm工艺一举突破到28nm工艺�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.6473779385171791" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iacxTbNw6uvQukVwM3jNToCt7YIVDArL7687ia5H3micxCA6kPMYVBqibWg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.21px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iacxTbNw6uvQukVwM3jNToCt7YIVDArL7687ia5H3micxCA6kPMYVBqibWg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.21px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：上海微电子官�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2021�?�?8日，上海微电子举行新产品发布会，宣布推出SSB520型新一代大视场高分辨率先进封装光刻机。据上微电子官网信息显示，新一代封装光刻机品投影物镜系统全面升级，可满�?.8μm分辨率光刻工艺需求，极限分辨率可�?.6μm；通过升级运动、量测和控制系统，套刻精度提升至�?00nm，并能保持长期稳定性�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">同时，上海微电子预计会在2021年年底交付采用ARF光源制程工艺�?8nm光刻机。此光刻机在经过多次曝光之后，可生产�?1nm制程芯片。此前上海微电子可量产光刻机受困�?0nm制程达四年之久，如若成功交付28nm光刻机，将打破光刻机国际巨头ASML公司常年对成熟和先进制程领域的技术封锁�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">而近年来，在国家政策的扶持以及一批龙头企业的带领下，我国光刻机技术也开始了飞速的发展，由长春光机所牵头承担的国家科技重大专项02专项——“极紫外光刻（EUVL）关键技术研究”项目也顺利完成了验收前现场测试。中科院光电技术研究所承担的“超分辨率光刻装备研制”项目通过验收、南大光电承担的国家科技重大专项�?2专项）“极大规模集成电路制造装备及成套工艺”之“先进光刻胶产品开发与产业化”项目通过验收……在国人共同的努力下，光刻机显然有了弯道超车的可能�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">正如ASML总裁皮特·韦尼克说：“出口管制将加快中国自主研发�?5年时间里他们将做出所有的东西”、“中国完全自主掌控供应链之后，欧洲供应商将彻底失去市场”，但短时间内国产光刻机技术想追上阿斯麦、佳能及尼康等拥有十几二十年技术沉淀的大厂，难度是不小的。毕竟，我们在进步，别人不会选择固步自封。此外，即使拥有了相应的技术，相关国产零部件等产业链技术也要跟得上才行�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">写在最后：用产业的力量寻求突破</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">光刻机是技术壁垒极高的产品，而EUV光刻机制造更是“难上加难”，不仅体现在技术设计方面，还在于零部件供应，一台顶尖的EUV光刻机包含了10万多个零部件，全球供应商超过5000家，从光刻机的结构分析来看，美国光源�?7%，荷兰腔体和英国真空部件�?2%，日本材料占27%，德国光学系统占14%。因此，仅从零部件供应来说，光刻机涵盖的产业链就十分庞大�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而，我国不仅有着高速发展的半导体行业，更有同光刻机密切相关且快速成长且的晶圆产业。根�?SEMI 统计，中国计划在 2017 年至 2020 年间建立一个强大、自给自足的半导体供应链，中国的晶圆制造产能在 2020 年达�?400 万片�?英寸）。晶圆产能的快速增长促进了半导体设备需求的增长。根�?SEMI 统计�?020年中国半导体设备行业市场规模�?187.20 亿美元，同比增长 39.18%�?009 年至 2020 年，中国半导体设备行业市场规模复合增长率�?31.25%，高于全球市场增长率 14.59%�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">经过多年培育，国产半导体设备已经取得重大进展，整体水平达�?28nm 制程，并�?14nm �?7nm 制程实现了部分设备的突破。先进制程产线为了保证产品良率，我国晶圆厂仍将以采购海外设备为主，待国产设备通过客户验证且下游客户产能顺利爬坡后，国产设备占比有望提升；而在中低端制程，国产化率有望得到显著提升�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">除传统硅基晶圆制造外，SiC 等第三代宽禁带半导体材料研发越发成熟，SiC器件的需求将逐渐增多，将会带动宽禁带半导体材料晶圆制造产线的建设，进一步促进对半导体设备的需求，而这些，都将成为国产光刻机成长的“沃土”！</span><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif; color: rgb(178, 178, 178); font-size: 12px; letter-spacing: 0.544px; overflow-wrap: break-word !important;">（编辑：</span><span style="margin: 0px; padding: 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height="50px"></a> </td> <td> <a href="http://www.l7consultores.com/" target="_blank">�?�?/a> </td> </tr> <tr> <td> <a href="" target="_blank">�?�?/a> </td> </tr> <tr> <td> <a href="/EditorArticle/40/" target="_blank">他的文章</a> </td> </tr> </tbody> </table> </div> <div class="floatedit01"> <img src="/images/fediter03.gif"> </div> </div> <div class="sub4lft"> <div class="sub4textit"> 国产光刻机破�?首台产品将于年内交付 </div> <div class="tabtit0523"> <ul> <li class="zhengwen"><a href="/Information/Industry/News/3355/335527.htm">正文</a></li> <li class="this" id="commentBar"><a href="/Comment_335527.html" style="text-decoration: none">我来说两�?span>(已有<span class="fcred commentNum">0</span>人参�?/span><span>)</span></a></li> </ul> </div> <div class="sub4textexpl"> <ul> <li>2021/9/26 11:49:40</li> <li>类型：原�?/li> <li>来源�?span>电脑�?/span></li> <li>报纸编辑�?a id="editor" href="/EditorArticle/40/" style="text-decoration: underline; color: blue;">电脑�?/a></li> <li>作者：</li> </ul> </div> <div class="sub4summary"> 【电脑报在线】半导体产业的核心在于制造，制造的核心在于设备�? </div> <div class="sub4text"> <p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">芯片制造之母，无比重要的光刻机</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在芯片制造漫长的产业链中，光刻机是最为耀眼的明珠，它代表了科技发展的顶级水平（另一个是航空发动机），更是芯片制造中必不可少的精密设备。在半导体领域，光刻机作为前道工艺七大设备之首（光刻机、刻蚀机、镀膜设备、量测设备、清洗机、离子注入机、其他设备），价值含量极大，技术要求极高�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">我们使用的几乎所有的电子设备都会使用芯片，而芯片制造的过程有：硅片的制备－-〉外延工艺－-〉热氧化�?〉扩散掺杂－-〉离子注入－-〉薄膜制备－-〉光刻－-〉刻蚀�?〉工艺集成等�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在同样大小的芯片制造过程中中，想让晶体管的数量增多，就需要从芯片的精细结构下手，如果芯片的制造能够越来越精细，达到相邻两个期间之间的距离达到几纳米的情况，芯片所能容纳的集体管会更多。那么对于精细结构的制造，该怎么才能做到呢？目前主流的是采用放大的思想，通过制造一个放大的模板（即掩膜），光通过模板照到硅片上，这也是光刻机的核心技术�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.64376130198915" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzWuankfVr6kPK3YkzHPnMbugydjGmyxTicPeGIgjiatlQm9Y2ibsGafQ/640?wx_fmt=png" data-type="png" data-w="553" _width="553.26px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzWuankfVr6kPK3YkzHPnMbugydjGmyxTicPeGIgjiatlQm9Y2ibsGafQ/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.26px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(136, 136, 136); font-size: 12px; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; overflow-wrap: break-word !important;">�?/span>图片来源：英特尔官方网站</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在集成电路制造工艺中，光刻是决定集成电路集成度的核心工序。光刻的原理是在硅片表面覆盖一层具有高度光敏感性的光刻胶，再用光线（一般是紫外线、深紫外线、极紫外线）透过掩模照射在硅片表面，被光线照射到的光刻胶会发生化学反应。此后用特定显影液洗去被照射/未被照射的光刻胶，就实现了电路图从掩模到硅片的转移。一般的光刻工艺要经历旋转涂胶、软烘、对准与曝光、曝光后烘焙、显影、坚膜烘焙、显影检查等工序�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.5523465703971119" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaWvhMFFYI8hrUCtsSV7fHUdVhZXfwtdByz1E72zjqkDib7BMw0K1micDw/640?wx_fmt=png" data-type="png" data-w="554" _width="553.66px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaWvhMFFYI8hrUCtsSV7fHUdVhZXfwtdByz1E72zjqkDib7BMw0K1micDw/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.66px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">�?/span><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">图片来源：北京华卓精科IPO说明�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">光刻机是完成光刻工艺的半导体设备。光刻机主要包括光源、投影物镜和工件台三个子系统及其他部件。其中，光源系统的主要作用为发出符合光刻要求的激光，投影物镜系统的主要作用为对光源发出光线进行精准聚焦，双工件台的主要作用为承载硅片并根据光刻需求进行精密运动，其决定了光刻机的分辨率和生产效率�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">经过多年的发展，光刻机按光源类型可分为五类：I-line 光刻机、KrF 光刻机、ArF 光刻机、ArFi 光刻机（�?ArF 浸没式光刻机，与 ArF 光刻机相比在曝光过程中在投影物镜和晶圆之间形成了一层水膜）、EUV 光刻机；按照应用领域可分�?IC 前道光刻机和 IC 后道光刻机。其中，IC 前道光刻机主要应用于芯片制造，而后道光刻机主要用于芯片封装�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2020年光刻机市场规模�?51亿美元，在整个半导体设备中占比约21%；涂胶显影设备市场规模约19亿美元，在整个半导体设备中占比约3%；干法去胶设备市场规模约6亿美元，在整个半导体设备中占比约1%�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">从市值来看，光刻机在整个半导体领域所占比重并不高，但作为最上游的“母机”，光刻机对整个半导体生态的影响是巨大的�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">光刻机之痛，中外差距巨大</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在实际半导体生产过程中，一个芯片的产生要经历几十次光刻才能完成，有些结构层甚至需要多次光刻才能形成。光刻是芯片制造的核心，是IC制造的最关键步骤，它确定了芯片的关键尺寸。在主流的微电子制造过程中，光刻是最复杂、昂贵和关键的工艺，其成本约占整个硅片加工成本的三分之一甚至更多。同时光刻机也是不可替代的，光刻成本占到了芯片整体制造工艺的40%�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而，在半导体设备中最为重要的一环——光刻机设备，最先进的技术基本被阿斯麦、佳能及尼康三大国际大厂垄断，其中阿斯麦（ASML）几乎在EUV（极紫外光刻）领域是垄断的，它垄断了全球14nm以上的高端光刻机市场，特别是7nm以上光刻机更�?00%垄处于垄断地位�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.628158844765343" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaKKKkgUwpcWvMKhyCrfWtiasW94iafWML3TqZibgRpZBYsORibOm7HdsfNg/640?wx_fmt=png" data-type="png" data-w="554" _width="553.61px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaKKKkgUwpcWvMKhyCrfWtiasW94iafWML3TqZibgRpZBYsORibOm7HdsfNg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.61px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">随着光源、曝光方式不断改进，光刻机前后共经历�?代产品，每一代产品都在不断降低光源波长，同时缩小制程线宽。第四代浸入式光刻机，最高制程可�?nm，在7nm之后必须使用第五代EUV光刻机，其采用EUV光源，波长为13.5nm，制程节点为7-3nm，是目前最先进的光刻机。而国内能与国际大厂正面抗衡的企业，暂时还没有�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">不少国人第一次高度关注和重视光刻机可以追溯到2018年，当年5月，中芯国际向ASML下单一台价�?.2亿美元的EUV光刻机，预计2019年底交付�?020年进行安装�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">几乎同时，特朗普政府向荷兰政府发出威胁，不得向中国交付这台EUV光刻机，否则美国政府将断供该光刻机上的美国部件，并在2019年明确向荷方表态：“好的盟友不会向中国出售这类设备”�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2019�?1月，ASML宣布，荷兰政府不再续签相关出口许可，向中芯国际出售EUV光刻机的计划正式终止�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.5782747603833865" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iahPcfrz7bv8TGspSRwXXclIniczSnq2MdfhpZoSAfpGzicz57wNX9p1KA/640?wx_fmt=png" data-type="png" data-w="626" _width="553.742px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iahPcfrz7bv8TGspSRwXXclIniczSnq2MdfhpZoSAfpGzicz57wNX9p1KA/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.742px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">这意味着，中国大陆的芯片厂商无法突破芯片10nm制程。而早�?017年，国产旗舰手机的芯片制程就已经来到10nm。到2021年，各品牌的旗舰手机芯片制程已经普遍使用5nm技术。也就是说，中国大陆无法自产电子产品所需要的先进制程芯片。这对中国大陆的半导体芯片制造产业，无疑是一个巨大的压制和打击�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">一�?2亿人民币，备受追捧的EUV光刻�?/span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">拥有先进的光刻机，意味着拥有制造先进制程芯片的潜力，而EUV光刻机成为这一切的关键所在�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">随着半导体技术的更新换代，光刻机也从最开始的g线（436nm）逐渐发展为近十年间兴起的EUV光刻机，从接触式向接近式，最后演变成步进式为主。EUV光刻机，又称极紫外线光刻机，是芯片生产工具，是生产大规模集成电路的核心设备，对芯片工艺有着决定性的影响，其中，小于5纳米的芯片晶圆，只能用EUV光刻机生产�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.45027124773960214" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzCfnvAN8rzf2ymzsMYWvpOz0MdQD7ENKSibF5o04eafTw2aib0zx2BQ/640?wx_fmt=png" data-type="png" data-w="553" _width="553.48px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaGzCfnvAN8rzf2ymzsMYWvpOz0MdQD7ENKSibF5o04eafTw2aib0zx2BQ/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.48px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">作为全球唯一一家能EUV光刻机的厂家，ASML自然获得了大量的订单，截止至2019年第二季度，ASML的NEX:3400B EUV光刻机的装机数量已经多达38台，而下半年他们推出了效率更高的NEX:3400C光刻机�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">�?019�?全年一共交付了26套EUV光刻机，为他们带来了27.89亿欧元的收入，占了全年收入的31%，而全年卖�?2台的ArFi远紫外线光刻机才进账47.67亿欧元，可见一套EUV光刻机是多么地赚钱�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.6799276672694394" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iak2qmNNbtTvNjLibDdicH4mQwouicwJzYAsRTdur1zKYa5ZVeoTx46GvUw/640?wx_fmt=png" data-type="png" data-w="553" _width="553.21px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iak2qmNNbtTvNjLibDdicH4mQwouicwJzYAsRTdur1zKYa5ZVeoTx46GvUw/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.21px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">10�?4日，ASML总裁兼首席执行官Peter Wennink在介绍公司三季度业绩时，说：“我们第三季度的新增订单达到�?9亿欧元，其中5.95亿欧元来�?台EUV设备。”由此估算，一台EUV光刻机的售价高达1.48亿欧元，折合人民�?1.74亿元�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">这个价格有多贵呢？按波音公司2014年产品目录公布的价格，一架波音B787飞机的零售价�?.571亿美元，按现在的汇率计算，大约合人民�?7.3亿元人民币�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">ASML财报数据显示�?020年，阿斯麦占据全球EUV光刻机出货的100%，占全球深紫外光刻机（DUV）出货的62%，剩下的份额由尼康和佳能瓜分。目前，阿斯麦最新一代极紫外光刻机TWINSCAN NXE:3600D已交付给客户，相较于前一代产品，该机型生产力提高15%-20%，套刻精度提�?0%</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而，在全球发生大规模“芯荒”之后，美国和欧洲各国政府已集中精力增强本国的芯片制造能力，这导致了政府对该行业的直接支持。美国参议院上个月通过一项法案，要求提供520亿美元的补贴来支持国内芯片生产�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">《华尔街日报》指出，EUV光刻机不能很快地装配在一起，随着全球芯片产能的扩张，阿斯麦的光刻机开始出现供不应求，客户有时甚至会要求在没有进行全面测试的情况下发货�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.46835443037974683" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaEib76Mcj5IZTZqlpS5FibQhOAcYOl9Hpjicmf42Upm63GkvXGgs8etFhg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.28px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaEib76Mcj5IZTZqlpS5FibQhOAcYOl9Hpjicmf42Upm63GkvXGgs8etFhg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.28px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：ASML官网</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">这种情况，也让阿斯麦有底气说出，即便暂时无法向中国大陆出货，其营收也不会受到影响，“我们的客户渴望得到这些机器”！</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">事实上，从EUV光刻机被生产出来那一刻开始，EUV光刻机就面临着缺货问题，一方面是ASML产能低，另外一方面是EUV光刻机需求巨大。据悉，三星和台积电是目前芯片制造技术最先进的厂商，两者一直都购买更多EUV光刻机，甚至三星李在镕都亲自去ASML协商购买更多EUV光刻机�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">另外，英特尔也在购买更多EUV光刻机，尤其是英特尔宣布进入晶圆代工领域，还�?025年重回芯片制造领域中的第一名后，其对EUV光刻机的需求更是直线增加�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">遗憾的是，根据ASML发布的数据显示，今年上半年仅交付�?0台EUV光刻机，还积压了大量的EUV光刻机订单，订单金额高达几十亿欧元。该数据显示，EUV光刻机被研发出来，ASML一直都在想办法提升产能，但这么多年过去了，ASML共计出货100余台EUV光刻机，今年年产能仅�?5台�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">显然，EUV光刻机供不应求的局面短时间内无法改变，国内光刻机市场状况又如何呢？</span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">奋力追赶，一步一个脚�?/span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">国内半导体产业使用的光刻机和国际先进企业使用的光刻机究竟有多大区别呢�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2015年，英特尔、三星、台积电购入ASML出产�?0nm制程EUV光刻机，领先进入10nm时代。而反观中芯国际历尽艰辛，只能买到ASML�?010年生产的32nm光刻机，整整落后�?年�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.3471971066907776" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaA0y6GemhOOXF7QYpHZj3ickby0qxJLNpsg5SnrQSUGycQBT6Cv5bOag/640?wx_fmt=png" data-type="png" data-w="553" _width="552.54px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaA0y6GemhOOXF7QYpHZj3ickby0qxJLNpsg5SnrQSUGycQBT6Cv5bOag/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 552.54px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：台积电官�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">5年的时间对于半导体产业来说，已经足够更新换代三次！按照公开披露的数据，2014年华为的研发经费�?5亿美元，是台积电的三倍以上。按照中国半导体行业业内的共识，如果中国大陆能像台湾省、韩国一样购进最先进的EUV光刻机，中国大陆能够在短时间内追平世界顶尖的半导体制造水平�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在外购路途不畅的情况下，自研突破封锁成为国人关注的焦点�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">早在2002年，光刻机就正式列入�?63重大科技攻关计划”。这一年，科技部和上海市政府共同牵头，国内多家企业共同组建了上海微电子，重点研�?00nm步进扫描投影光刻机�?008年国家启动了主攻装备、材料和工艺等配套能力的�?2专项”，扶持国内光刻机产业链。除了上海微电子负责整机制造，还扶持了一批配套企业的研发：比如长春光电所、上海光电所和国科精密研究曝光光学系统，华卓精科承担双工件台，南大光电研制光刻胶，启尔机电负责突破DUV光刻机液浸系统等�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">如今，国产光刻机在艰难中已有了星星之火。十余年的持续投入下，国内产业链在光源系统、曝光光学系统等方面取得突破�?016年，国科精密研发的国内首套用于高�?IC 制造的 NA=0.75 投影光刻机物镜系统、国望光学研发的首套90nm节点ArF投影光刻机曝光光学系统都已交付�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.8028933092224232" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaYzCOCibicQsVRHEWwfKxqibS5sgGE5ic54nrczusJIpkaC4ibHZVrnicURdg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.33px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iaYzCOCibicQsVRHEWwfKxqibS5sgGE5ic54nrczusJIpkaC4ibHZVrnicURdg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.33px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：上海微电子官�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">在国产光刻机技术领域，上海微电子（SMEE）一枝独秀。其产品主要采用ArF、KrF和i-line光源，目前只能达�?0nm制程，且主要用于IC的后道封装和面板领域。SMEE作为国内最领先的光刻机研发企业，有非常多的光刻工艺人才，在产业链还未成熟的国内光刻机行业中，人才优势是主要核心竞争力。作为芯片行业的上游，目前国内还未出现能制造出能满足芯片行业需求的企业，而有着众多光刻工艺人才的SMEE，自然而然就成为最有竞争优势的企业�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2020�?月初，上海微电子宣布将在2021-2022年交付第一�?8nm工艺的国产浸入式光刻机，国产光刻机有望从此前�?0nm工艺一举突破到28nm工艺�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><img data-ratio="0.6473779385171791" data-src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iacxTbNw6uvQukVwM3jNToCt7YIVDArL7687ia5H3micxCA6kPMYVBqibWg/640?wx_fmt=png" data-type="png" data-w="553" _width="553.21px" src="https://mmbiz.qpic.cn/sz_mmbiz_png/HrhrgxCloNaxwhPhKNqXDEdEQxZcUN0iacxTbNw6uvQukVwM3jNToCt7YIVDArL7687ia5H3micxCA6kPMYVBqibWg/640?wx_fmt=png&wxfrom=5&wx_lazy=1&wx_co=1" wah-hotarea="click" crossorigin="anonymous" alt="图片" data-fail="0" style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; height: auto !important; border: 10px solid rgb(255, 255, 255); box-shadow: rgba(0, 0, 0, 0.329412) 0px 0px 6px 0px; overflow-wrap: break-word !important; width: 553.21px !important; visibility: visible !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 12px; color: rgb(136, 136, 136); box-sizing: border-box !important; overflow-wrap: break-word !important;">▷图片来源：上海微电子官�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">2021�?�?8日，上海微电子举行新产品发布会，宣布推出SSB520型新一代大视场高分辨率先进封装光刻机。据上微电子官网信息显示，新一代封装光刻机品投影物镜系统全面升级，可满�?.8μm分辨率光刻工艺需求，极限分辨率可�?.6μm；通过升级运动、量测和控制系统，套刻精度提升至�?00nm，并能保持长期稳定性�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">同时，上海微电子预计会在2021年年底交付采用ARF光源制程工艺�?8nm光刻机。此光刻机在经过多次曝光之后，可生产�?1nm制程芯片。此前上海微电子可量产光刻机受困�?0nm制程达四年之久，如若成功交付28nm光刻机，将打破光刻机国际巨头ASML公司常年对成熟和先进制程领域的技术封锁�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">而近年来，在国家政策的扶持以及一批龙头企业的带领下，我国光刻机技术也开始了飞速的发展，由长春光机所牵头承担的国家科技重大专项02专项——“极紫外光刻（EUVL）关键技术研究”项目也顺利完成了验收前现场测试。中科院光电技术研究所承担的“超分辨率光刻装备研制”项目通过验收、南大光电承担的国家科技重大专项�?2专项）“极大规模集成电路制造装备及成套工艺”之“先进光刻胶产品开发与产业化”项目通过验收……在国人共同的努力下，光刻机显然有了弯道超车的可能�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">正如ASML总裁皮特·韦尼克说：“出口管制将加快中国自主研发�?5年时间里他们将做出所有的东西”、“中国完全自主掌控供应链之后，欧洲供应商将彻底失去市场”，但短时间内国产光刻机技术想追上阿斯麦、佳能及尼康等拥有十几二十年技术沉淀的大厂，难度是不小的。毕竟，我们在进步，别人不会选择固步自封。此外，即使拥有了相应的技术，相关国产零部件等产业链技术也要跟得上才行�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; color: rgb(61, 167, 66);"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; font-size: 17px; box-sizing: border-box !important; overflow-wrap: break-word !important;">写在最后：用产业的力量寻求突破</span></span></span></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">光刻机是技术壁垒极高的产品，而EUV光刻机制造更是“难上加难”，不仅体现在技术设计方面，还在于零部件供应，一台顶尖的EUV光刻机包含了10万多个零部件，全球供应商超过5000家，从光刻机的结构分析来看，美国光源�?7%，荷兰腔体和英国真空部件�?2%，日本材料占27%，德国光学系统占14%。因此，仅从零部件供应来说，光刻机涵盖的产业链就十分庞大�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">然而，我国不仅有着高速发展的半导体行业，更有同光刻机密切相关且快速成长且的晶圆产业。根�?SEMI 统计，中国计划在 2017 年至 2020 年间建立一个强大、自给自足的半导体供应链，中国的晶圆制造产能在 2020 年达�?400 万片�?英寸）。晶圆产能的快速增长促进了半导体设备需求的增长。根�?SEMI 统计�?020年中国半导体设备行业市场规模�?187.20 亿美元，同比增长 39.18%�?009 年至 2020 年，中国半导体设备行业市场规模复合增长率�?31.25%，高于全球市场增长率 14.59%�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">经过多年培育，国产半导体设备已经取得重大进展，整体水平达�?28nm 制程，并�?14nm �?7nm 制程实现了部分设备的突破。先进制程产线为了保证产品良率，我国晶圆厂仍将以采购海外设备为主，待国产设备通过客户验证且下游客户产能顺利爬坡后，国产设备占比有望提升；而在中低端制程，国产化率有望得到显著提升�?/span></p><p style="margin: 5px 0px; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; letter-spacing: 0.4352px; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; box-sizing: border-box !important; overflow-wrap: break-word !important;"><br style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; overflow-wrap: break-word !important;" /></p><p style="margin: 0em 0.5em; padding: 0px; outline: 0px; max-width: 100%; clear: both; min-height: 1em; text-align: justify; text-size-adjust: auto; font-family: 微软雅黑, "Microsoft YaHei"; font-size: 16px; letter-spacing: 0.5px; line-height: 1.75em; box-sizing: border-box !important; overflow-wrap: break-word !important;"><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-size: 15px; color: rgb(63, 63, 63); overflow-wrap: break-word !important;">除传统硅基晶圆制造外，SiC 等第三代宽禁带半导体材料研发越发成熟，SiC器件的需求将逐渐增多，将会带动宽禁带半导体材料晶圆制造产线的建设，进一步促进对半导体设备的需求，而这些，都将成为国产光刻机成长的“沃土”！</span><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif; color: rgb(178, 178, 178); font-size: 12px; letter-spacing: 0.544px; overflow-wrap: break-word !important;">（编辑：</span><span style="margin: 0px; padding: 0px; outline: 0px; max-width: 100%; box-sizing: border-box !important; word-wrap: break-word !important; font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif; color: rgb(178, 178, 178); font-size: 12px; letter-spacing: 0.544px; overflow-wrap: break-word !important;">崔崔�?/span></p> </div> <div class="invest" 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